4/15/2011	12:01:42 AM	Helium valve closed
4/15/2011	12:01:44 AM	Helium MFC set to  0.000000
4/15/2011	12:06:04 AM	Recipe started at 12:06 AM
4/15/2011	12:06:04 AM	BCl3 valve closed
4/15/2011	12:06:04 AM	PH3 valve closed
4/15/2011	12:06:04 AM	SiCl4 pre valve closed
4/15/2011	12:06:04 AM	SiCl4 post valve closed
4/15/2011	12:06:04 AM	Main Vac valve closed
4/15/2011	12:06:04 AM	Bypass valve closed
4/15/2011	12:06:04 AM	Bubbler valve closed
4/15/2011	12:06:04 AM	Helium valve opened
4/15/2011	12:06:04 AM	H2 valve opened
4/15/2011	12:06:04 AM	Helium MFC set to  190.000000
4/15/2011	12:06:04 AM	H2 MFC set to  10.000000
4/15/2011	12:06:04 AM	BCl3 MFC set to  0.000000
4/15/2011	12:06:04 AM	PHl3 MFC set to  0.000000
4/15/2011	12:06:04 AM	SiCl4 MFC set to  0.000000
4/15/2011	12:06:04 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:06:04 AM	Tube furnace set to 0
4/15/2011	12:09:29 AM	BCl3 valve closed
4/15/2011	12:09:29 AM	PH3 valve closed
4/15/2011	12:09:29 AM	SiCl4 pre valve closed
4/15/2011	12:09:29 AM	SiCl4 post valve closed
4/15/2011	12:09:29 AM	Main Vac valve closed
4/15/2011	12:09:29 AM	Bypass valve closed
4/15/2011	12:09:29 AM	Helium valve opened
4/15/2011	12:09:29 AM	H2 valve opened
4/15/2011	12:09:29 AM	Bubbler valve opened
4/15/2011	12:09:29 AM	Helium MFC set to  47.500000
4/15/2011	12:09:29 AM	H2 MFC set to  2.500000
4/15/2011	12:09:29 AM	BCl3 MFC set to  0.000000
4/15/2011	12:09:29 AM	PHl3 MFC set to  0.000000
4/15/2011	12:09:29 AM	SiCl4 MFC set to  0.000000
4/15/2011	12:09:29 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:09:29 AM	Tube furnace set to 350
4/15/2011	8:58:09 AM	Run aborted at 8:58 AM
4/15/2011	8:58:09 AM	Helium valve closed
4/15/2011	8:58:09 AM	H2 valve closed
4/15/2011	8:58:09 AM	BCl3 valve closed
4/15/2011	8:58:09 AM	PH3 valve closed
4/15/2011	8:58:09 AM	SiCl4 pre valve closed
4/15/2011	8:58:09 AM	SiCl4 post valve closed
4/15/2011	8:58:09 AM	Bypass valve closed
4/15/2011	8:58:09 AM	Main Vac valve closed
4/15/2011	8:58:09 AM	Bubbler valve closed
4/15/2011	8:58:09 AM	Helium MFC set to  0.000000
4/15/2011	8:58:09 AM	H2 MFC set to  0.000000
4/15/2011	8:58:09 AM	BCl3 MFC set to  0.000000
4/15/2011	8:58:09 AM	PHl3 MFC set to  0.000000
4/15/2011	8:58:09 AM	SiCl4 MFC set to  0.000000
4/15/2011	8:58:09 AM	Tube furnace set to 0
4/15/2011	9:43:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	9:43:32 AM	Recipe started at 9:43 AM
4/15/2011	9:43:32 AM	Helium valve closed
4/15/2011	9:43:32 AM	H2 valve closed
4/15/2011	9:43:32 AM	BCl3 valve closed
4/15/2011	9:43:32 AM	PH3 valve closed
4/15/2011	9:43:32 AM	SiCl4 pre valve closed
4/15/2011	9:43:32 AM	SiCl4 post valve closed
4/15/2011	9:43:32 AM	Main Vac valve closed
4/15/2011	9:43:32 AM	Bubbler valve closed
4/15/2011	9:43:32 AM	Bypass valve opened
4/15/2011	9:43:32 AM	Helium MFC set to  0.000000
4/15/2011	9:43:32 AM	H2 MFC set to  0.000000
4/15/2011	9:43:32 AM	BCl3 MFC set to  0.000000
4/15/2011	9:43:32 AM	PHl3 MFC set to  0.000000
4/15/2011	9:43:32 AM	SiCl4 MFC set to  0.000000
4/15/2011	9:43:32 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	9:43:33 AM	Tube furnace set to 0
4/15/2011	9:44:05 AM	Helium valve closed
4/15/2011	9:44:05 AM	H2 valve closed
4/15/2011	9:44:05 AM	BCl3 valve closed
4/15/2011	9:44:05 AM	PH3 valve closed
4/15/2011	9:44:05 AM	SiCl4 pre valve closed
4/15/2011	9:44:05 AM	SiCl4 post valve closed
4/15/2011	9:44:05 AM	Bubbler valve closed
4/15/2011	9:44:05 AM	Main Vac valve opened
4/15/2011	9:44:05 AM	Bypass valve opened
4/15/2011	9:44:05 AM	Helium MFC set to  0.000000
4/15/2011	9:44:05 AM	H2 MFC set to  0.000000
4/15/2011	9:44:05 AM	BCl3 MFC set to  0.000000
4/15/2011	9:44:05 AM	PHl3 MFC set to  0.000000
4/15/2011	9:44:05 AM	SiCl4 MFC set to  0.000000
4/15/2011	9:44:05 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	9:44:06 AM	Tube furnace set to 0
4/15/2011	9:44:06 AM	Run finished at 9:44 AM
4/15/2011	9:44:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	10:23:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	10:23:43 AM	Recipe started at 10:23 AM
4/15/2011	10:23:43 AM	H2 valve closed
4/15/2011	10:23:43 AM	BCl3 valve closed
4/15/2011	10:23:43 AM	PH3 valve closed
4/15/2011	10:23:43 AM	SiCl4 pre valve closed
4/15/2011	10:23:43 AM	SiCl4 post valve closed
4/15/2011	10:23:43 AM	Main Vac valve closed
4/15/2011	10:23:43 AM	Bypass valve closed
4/15/2011	10:23:43 AM	Bubbler valve closed
4/15/2011	10:23:43 AM	Helium valve opened
4/15/2011	10:23:43 AM	Helium MFC set to  500.000000
4/15/2011	10:23:43 AM	H2 MFC set to  0.000000
4/15/2011	10:23:43 AM	BCl3 MFC set to  0.000000
4/15/2011	10:23:43 AM	PHl3 MFC set to  0.000000
4/15/2011	10:23:43 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:23:43 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:23:43 AM	Tube furnace set to 0
4/15/2011	10:25:03 AM	Helium valve closed
4/15/2011	10:25:03 AM	H2 valve closed
4/15/2011	10:25:03 AM	BCl3 valve closed
4/15/2011	10:25:03 AM	PH3 valve closed
4/15/2011	10:25:03 AM	SiCl4 pre valve closed
4/15/2011	10:25:03 AM	SiCl4 post valve closed
4/15/2011	10:25:03 AM	Main Vac valve closed
4/15/2011	10:25:03 AM	Bypass valve closed
4/15/2011	10:25:03 AM	Bubbler valve closed
4/15/2011	10:25:03 AM	Helium MFC set to  0.000000
4/15/2011	10:25:03 AM	H2 MFC set to  0.000000
4/15/2011	10:25:03 AM	BCl3 MFC set to  0.000000
4/15/2011	10:25:03 AM	PHl3 MFC set to  0.000000
4/15/2011	10:25:03 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:25:03 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:25:03 AM	Tube furnace set to 0
4/15/2011	10:25:03 AM	Run finished at 10:25 AM
4/15/2011	10:25:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	10:27:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	10:27:46 AM	Recipe started at 10:27 AM
4/15/2011	10:27:46 AM	Helium valve closed
4/15/2011	10:27:46 AM	H2 valve closed
4/15/2011	10:27:46 AM	BCl3 valve closed
4/15/2011	10:27:46 AM	PH3 valve closed
4/15/2011	10:27:46 AM	SiCl4 pre valve closed
4/15/2011	10:27:46 AM	SiCl4 post valve closed
4/15/2011	10:27:46 AM	Main Vac valve closed
4/15/2011	10:27:46 AM	Bubbler valve closed
4/15/2011	10:27:46 AM	Bypass valve opened
4/15/2011	10:27:46 AM	Helium MFC set to  0.000000
4/15/2011	10:27:46 AM	H2 MFC set to  0.000000
4/15/2011	10:27:46 AM	BCl3 MFC set to  0.000000
4/15/2011	10:27:46 AM	PHl3 MFC set to  0.000000
4/15/2011	10:27:46 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:27:46 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:27:46 AM	Tube furnace set to 0
4/15/2011	10:28:17 AM	Helium valve closed
4/15/2011	10:28:17 AM	H2 valve closed
4/15/2011	10:28:17 AM	BCl3 valve closed
4/15/2011	10:28:17 AM	PH3 valve closed
4/15/2011	10:28:17 AM	SiCl4 pre valve closed
4/15/2011	10:28:17 AM	SiCl4 post valve closed
4/15/2011	10:28:17 AM	Bubbler valve closed
4/15/2011	10:28:17 AM	Main Vac valve opened
4/15/2011	10:28:17 AM	Bypass valve opened
4/15/2011	10:28:17 AM	Helium MFC set to  0.000000
4/15/2011	10:28:17 AM	H2 MFC set to  0.000000
4/15/2011	10:28:17 AM	BCl3 MFC set to  0.000000
4/15/2011	10:28:17 AM	PHl3 MFC set to  0.000000
4/15/2011	10:28:17 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:28:17 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:28:17 AM	Tube furnace set to 0
4/15/2011	10:28:17 AM	Run finished at 10:28 AM
4/15/2011	10:28:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	10:28:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	10:28:35 AM	Recipe started at 10:28 AM
4/15/2011	10:28:35 AM	H2 valve closed
4/15/2011	10:28:35 AM	BCl3 valve closed
4/15/2011	10:28:35 AM	PH3 valve closed
4/15/2011	10:28:35 AM	SiCl4 pre valve closed
4/15/2011	10:28:35 AM	SiCl4 post valve closed
4/15/2011	10:28:35 AM	Main Vac valve closed
4/15/2011	10:28:35 AM	Bypass valve closed
4/15/2011	10:28:35 AM	Bubbler valve closed
4/15/2011	10:28:35 AM	Helium valve opened
4/15/2011	10:28:35 AM	Helium MFC set to  500.000000
4/15/2011	10:28:35 AM	H2 MFC set to  0.000000
4/15/2011	10:28:35 AM	BCl3 MFC set to  0.000000
4/15/2011	10:28:35 AM	PHl3 MFC set to  0.000000
4/15/2011	10:28:35 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:28:35 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:28:36 AM	Tube furnace set to 0
4/15/2011	10:29:55 AM	Helium valve closed
4/15/2011	10:29:55 AM	H2 valve closed
4/15/2011	10:29:55 AM	BCl3 valve closed
4/15/2011	10:29:55 AM	PH3 valve closed
4/15/2011	10:29:55 AM	SiCl4 pre valve closed
4/15/2011	10:29:55 AM	SiCl4 post valve closed
4/15/2011	10:29:55 AM	Main Vac valve closed
4/15/2011	10:29:55 AM	Bypass valve closed
4/15/2011	10:29:55 AM	Bubbler valve closed
4/15/2011	10:29:55 AM	Helium MFC set to  0.000000
4/15/2011	10:29:55 AM	H2 MFC set to  0.000000
4/15/2011	10:29:55 AM	BCl3 MFC set to  0.000000
4/15/2011	10:29:55 AM	PHl3 MFC set to  0.000000
4/15/2011	10:29:55 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:29:55 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:29:56 AM	Tube furnace set to 0
4/15/2011	10:29:56 AM	Run finished at 10:29 AM
4/15/2011	10:29:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	10:32:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	10:32:26 AM	Recipe started at 10:32 AM
4/15/2011	10:32:27 AM	Helium valve closed
4/15/2011	10:32:27 AM	H2 valve closed
4/15/2011	10:32:27 AM	BCl3 valve closed
4/15/2011	10:32:27 AM	PH3 valve closed
4/15/2011	10:32:27 AM	SiCl4 pre valve closed
4/15/2011	10:32:27 AM	SiCl4 post valve closed
4/15/2011	10:32:27 AM	Main Vac valve closed
4/15/2011	10:32:27 AM	Bubbler valve closed
4/15/2011	10:32:27 AM	Bypass valve opened
4/15/2011	10:32:27 AM	Helium MFC set to  0.000000
4/15/2011	10:32:27 AM	H2 MFC set to  0.000000
4/15/2011	10:32:27 AM	BCl3 MFC set to  0.000000
4/15/2011	10:32:27 AM	PHl3 MFC set to  0.000000
4/15/2011	10:32:27 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:32:27 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:32:27 AM	Tube furnace set to 0
4/15/2011	10:32:57 AM	Helium valve closed
4/15/2011	10:32:57 AM	H2 valve closed
4/15/2011	10:32:57 AM	BCl3 valve closed
4/15/2011	10:32:57 AM	PH3 valve closed
4/15/2011	10:32:57 AM	SiCl4 pre valve closed
4/15/2011	10:32:57 AM	SiCl4 post valve closed
4/15/2011	10:32:57 AM	Bubbler valve closed
4/15/2011	10:32:57 AM	Main Vac valve opened
4/15/2011	10:32:57 AM	Bypass valve opened
4/15/2011	10:32:57 AM	Helium MFC set to  0.000000
4/15/2011	10:32:57 AM	H2 MFC set to  0.000000
4/15/2011	10:32:57 AM	BCl3 MFC set to  0.000000
4/15/2011	10:32:57 AM	PHl3 MFC set to  0.000000
4/15/2011	10:32:57 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:32:57 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:32:58 AM	Tube furnace set to 0
4/15/2011	10:32:58 AM	Run finished at 10:32 AM
4/15/2011	10:32:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	10:37:01 AM	Tube furnace set to 300
4/15/2011	10:44:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/15/2011	10:44:13 AM	Recipe started at 10:44 AM
4/15/2011	10:44:13 AM	Helium valve closed
4/15/2011	10:44:13 AM	H2 valve closed
4/15/2011	10:44:13 AM	BCl3 valve closed
4/15/2011	10:44:13 AM	PH3 valve closed
4/15/2011	10:44:13 AM	SiCl4 pre valve closed
4/15/2011	10:44:13 AM	SiCl4 post valve closed
4/15/2011	10:44:13 AM	Main Vac valve closed
4/15/2011	10:44:13 AM	Bubbler valve closed
4/15/2011	10:44:13 AM	Bypass valve opened
4/15/2011	10:44:13 AM	Helium MFC set to  0.000000
4/15/2011	10:44:13 AM	H2 MFC set to  0.000000
4/15/2011	10:44:13 AM	BCl3 MFC set to  0.000000
4/15/2011	10:44:13 AM	PHl3 MFC set to  0.000000
4/15/2011	10:44:13 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:44:13 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:44:14 AM	Tube furnace set to 0
4/15/2011	10:44:14 AM	Helium valve closed
4/15/2011	10:44:14 AM	H2 valve closed
4/15/2011	10:44:14 AM	BCl3 valve closed
4/15/2011	10:44:14 AM	PH3 valve closed
4/15/2011	10:44:14 AM	SiCl4 pre valve closed
4/15/2011	10:44:14 AM	SiCl4 post valve closed
4/15/2011	10:44:14 AM	Bubbler valve closed
4/15/2011	10:44:14 AM	Main Vac valve opened
4/15/2011	10:44:14 AM	Bypass valve opened
4/15/2011	10:44:14 AM	Helium MFC set to  0.000000
4/15/2011	10:44:14 AM	H2 MFC set to  0.000000
4/15/2011	10:44:14 AM	BCl3 MFC set to  0.000000
4/15/2011	10:44:14 AM	PHl3 MFC set to  0.000000
4/15/2011	10:44:14 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:44:14 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:44:14 AM	Tube furnace set to 0
4/15/2011	10:45:14 AM	H2 valve closed
4/15/2011	10:45:14 AM	BCl3 valve closed
4/15/2011	10:45:14 AM	PH3 valve closed
4/15/2011	10:45:14 AM	SiCl4 pre valve closed
4/15/2011	10:45:14 AM	SiCl4 post valve closed
4/15/2011	10:45:14 AM	Bubbler valve closed
4/15/2011	10:45:14 AM	Helium valve opened
4/15/2011	10:45:14 AM	Main Vac valve opened
4/15/2011	10:45:14 AM	Bypass valve opened
4/15/2011	10:45:14 AM	Helium MFC set to  100.000000
4/15/2011	10:45:14 AM	H2 MFC set to  0.000000
4/15/2011	10:45:14 AM	BCl3 MFC set to  0.000000
4/15/2011	10:45:14 AM	PHl3 MFC set to  0.000000
4/15/2011	10:45:14 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:45:14 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:45:14 AM	Tube furnace set to 0
4/15/2011	10:46:14 AM	Helium valve closed
4/15/2011	10:46:14 AM	H2 valve closed
4/15/2011	10:46:14 AM	BCl3 valve closed
4/15/2011	10:46:14 AM	PH3 valve closed
4/15/2011	10:46:14 AM	SiCl4 pre valve closed
4/15/2011	10:46:14 AM	SiCl4 post valve closed
4/15/2011	10:46:14 AM	Bubbler valve closed
4/15/2011	10:46:14 AM	Main Vac valve opened
4/15/2011	10:46:14 AM	Bypass valve opened
4/15/2011	10:46:14 AM	Helium MFC set to  0.000000
4/15/2011	10:46:14 AM	H2 MFC set to  0.000000
4/15/2011	10:46:14 AM	BCl3 MFC set to  0.000000
4/15/2011	10:46:14 AM	PHl3 MFC set to  0.000000
4/15/2011	10:46:14 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:46:14 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:46:14 AM	Tube furnace set to 0
4/15/2011	10:47:14 AM	H2 valve closed
4/15/2011	10:47:14 AM	BCl3 valve closed
4/15/2011	10:47:14 AM	PH3 valve closed
4/15/2011	10:47:14 AM	SiCl4 pre valve closed
4/15/2011	10:47:14 AM	SiCl4 post valve closed
4/15/2011	10:47:14 AM	Bubbler valve closed
4/15/2011	10:47:14 AM	Helium valve opened
4/15/2011	10:47:14 AM	Main Vac valve opened
4/15/2011	10:47:14 AM	Bypass valve opened
4/15/2011	10:47:14 AM	Helium MFC set to  100.000000
4/15/2011	10:47:14 AM	H2 MFC set to  0.000000
4/15/2011	10:47:14 AM	BCl3 MFC set to  0.000000
4/15/2011	10:47:14 AM	PHl3 MFC set to  0.000000
4/15/2011	10:47:14 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:47:14 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:47:15 AM	Tube furnace set to 0
4/15/2011	10:48:15 AM	Helium valve closed
4/15/2011	10:48:15 AM	H2 valve closed
4/15/2011	10:48:15 AM	BCl3 valve closed
4/15/2011	10:48:15 AM	PH3 valve closed
4/15/2011	10:48:15 AM	SiCl4 pre valve closed
4/15/2011	10:48:15 AM	SiCl4 post valve closed
4/15/2011	10:48:15 AM	Bubbler valve closed
4/15/2011	10:48:15 AM	Main Vac valve opened
4/15/2011	10:48:15 AM	Bypass valve opened
4/15/2011	10:48:15 AM	Helium MFC set to  0.000000
4/15/2011	10:48:15 AM	H2 MFC set to  0.000000
4/15/2011	10:48:15 AM	BCl3 MFC set to  0.000000
4/15/2011	10:48:15 AM	PHl3 MFC set to  0.000000
4/15/2011	10:48:15 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:48:15 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:48:15 AM	Tube furnace set to 0
4/15/2011	10:49:15 AM	H2 valve closed
4/15/2011	10:49:15 AM	BCl3 valve closed
4/15/2011	10:49:15 AM	PH3 valve closed
4/15/2011	10:49:15 AM	SiCl4 pre valve closed
4/15/2011	10:49:15 AM	SiCl4 post valve closed
4/15/2011	10:49:15 AM	Bubbler valve closed
4/15/2011	10:49:15 AM	Helium valve opened
4/15/2011	10:49:15 AM	Main Vac valve opened
4/15/2011	10:49:15 AM	Bypass valve opened
4/15/2011	10:49:15 AM	Helium MFC set to  100.000000
4/15/2011	10:49:15 AM	H2 MFC set to  0.000000
4/15/2011	10:49:15 AM	BCl3 MFC set to  0.000000
4/15/2011	10:49:15 AM	PHl3 MFC set to  0.000000
4/15/2011	10:49:15 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:49:15 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:49:15 AM	Tube furnace set to 0
4/15/2011	10:50:15 AM	Helium valve closed
4/15/2011	10:50:15 AM	H2 valve closed
4/15/2011	10:50:15 AM	BCl3 valve closed
4/15/2011	10:50:15 AM	PH3 valve closed
4/15/2011	10:50:15 AM	SiCl4 pre valve closed
4/15/2011	10:50:15 AM	SiCl4 post valve closed
4/15/2011	10:50:15 AM	Bubbler valve closed
4/15/2011	10:50:15 AM	Main Vac valve opened
4/15/2011	10:50:15 AM	Bypass valve opened
4/15/2011	10:50:15 AM	Helium MFC set to  0.000000
4/15/2011	10:50:15 AM	H2 MFC set to  0.000000
4/15/2011	10:50:15 AM	BCl3 MFC set to  0.000000
4/15/2011	10:50:15 AM	PHl3 MFC set to  0.000000
4/15/2011	10:50:15 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:50:15 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:50:15 AM	Tube furnace set to 0
4/15/2011	10:51:15 AM	H2 valve closed
4/15/2011	10:51:15 AM	BCl3 valve closed
4/15/2011	10:51:15 AM	PH3 valve closed
4/15/2011	10:51:15 AM	SiCl4 pre valve closed
4/15/2011	10:51:15 AM	SiCl4 post valve closed
4/15/2011	10:51:15 AM	Bubbler valve closed
4/15/2011	10:51:15 AM	Helium valve opened
4/15/2011	10:51:15 AM	Main Vac valve opened
4/15/2011	10:51:15 AM	Bypass valve opened
4/15/2011	10:51:15 AM	Helium MFC set to  100.000000
4/15/2011	10:51:15 AM	H2 MFC set to  0.000000
4/15/2011	10:51:15 AM	BCl3 MFC set to  0.000000
4/15/2011	10:51:15 AM	PHl3 MFC set to  0.000000
4/15/2011	10:51:15 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:51:15 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:51:15 AM	Tube furnace set to 0
4/15/2011	10:52:15 AM	Helium valve closed
4/15/2011	10:52:15 AM	H2 valve closed
4/15/2011	10:52:15 AM	BCl3 valve closed
4/15/2011	10:52:15 AM	PH3 valve closed
4/15/2011	10:52:15 AM	SiCl4 pre valve closed
4/15/2011	10:52:15 AM	SiCl4 post valve closed
4/15/2011	10:52:15 AM	Bubbler valve closed
4/15/2011	10:52:15 AM	Main Vac valve opened
4/15/2011	10:52:15 AM	Bypass valve opened
4/15/2011	10:52:15 AM	Helium MFC set to  0.000000
4/15/2011	10:52:15 AM	H2 MFC set to  0.000000
4/15/2011	10:52:15 AM	BCl3 MFC set to  0.000000
4/15/2011	10:52:15 AM	PHl3 MFC set to  0.000000
4/15/2011	10:52:15 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:52:15 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:52:16 AM	Tube furnace set to 0
4/15/2011	10:53:16 AM	H2 valve closed
4/15/2011	10:53:16 AM	BCl3 valve closed
4/15/2011	10:53:16 AM	PH3 valve closed
4/15/2011	10:53:16 AM	SiCl4 pre valve closed
4/15/2011	10:53:16 AM	SiCl4 post valve closed
4/15/2011	10:53:16 AM	Bubbler valve closed
4/15/2011	10:53:16 AM	Helium valve opened
4/15/2011	10:53:16 AM	Main Vac valve opened
4/15/2011	10:53:16 AM	Bypass valve opened
4/15/2011	10:53:16 AM	Helium MFC set to  100.000000
4/15/2011	10:53:16 AM	H2 MFC set to  0.000000
4/15/2011	10:53:16 AM	BCl3 MFC set to  0.000000
4/15/2011	10:53:16 AM	PHl3 MFC set to  0.000000
4/15/2011	10:53:16 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:53:16 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:53:16 AM	Tube furnace set to 0
4/15/2011	10:54:16 AM	Helium valve closed
4/15/2011	10:54:16 AM	H2 valve closed
4/15/2011	10:54:16 AM	BCl3 valve closed
4/15/2011	10:54:16 AM	PH3 valve closed
4/15/2011	10:54:16 AM	SiCl4 pre valve closed
4/15/2011	10:54:16 AM	SiCl4 post valve closed
4/15/2011	10:54:16 AM	Bubbler valve closed
4/15/2011	10:54:16 AM	Main Vac valve opened
4/15/2011	10:54:16 AM	Bypass valve opened
4/15/2011	10:54:16 AM	Helium MFC set to  0.000000
4/15/2011	10:54:16 AM	H2 MFC set to  0.000000
4/15/2011	10:54:16 AM	BCl3 MFC set to  0.000000
4/15/2011	10:54:16 AM	PHl3 MFC set to  0.000000
4/15/2011	10:54:16 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:54:16 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:54:16 AM	Tube furnace set to 0
4/15/2011	10:55:16 AM	H2 valve closed
4/15/2011	10:55:16 AM	BCl3 valve closed
4/15/2011	10:55:16 AM	PH3 valve closed
4/15/2011	10:55:16 AM	SiCl4 pre valve closed
4/15/2011	10:55:16 AM	SiCl4 post valve closed
4/15/2011	10:55:16 AM	Bubbler valve closed
4/15/2011	10:55:16 AM	Helium valve opened
4/15/2011	10:55:16 AM	Main Vac valve opened
4/15/2011	10:55:16 AM	Bypass valve opened
4/15/2011	10:55:16 AM	Helium MFC set to  100.000000
4/15/2011	10:55:16 AM	H2 MFC set to  0.000000
4/15/2011	10:55:16 AM	BCl3 MFC set to  0.000000
4/15/2011	10:55:16 AM	PHl3 MFC set to  0.000000
4/15/2011	10:55:16 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:55:16 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:55:16 AM	Tube furnace set to 0
4/15/2011	10:56:16 AM	Helium valve closed
4/15/2011	10:56:16 AM	H2 valve closed
4/15/2011	10:56:16 AM	BCl3 valve closed
4/15/2011	10:56:16 AM	PH3 valve closed
4/15/2011	10:56:16 AM	SiCl4 pre valve closed
4/15/2011	10:56:16 AM	SiCl4 post valve closed
4/15/2011	10:56:16 AM	Bubbler valve closed
4/15/2011	10:56:16 AM	Main Vac valve opened
4/15/2011	10:56:16 AM	Bypass valve opened
4/15/2011	10:56:16 AM	Helium MFC set to  0.000000
4/15/2011	10:56:16 AM	H2 MFC set to  0.000000
4/15/2011	10:56:16 AM	BCl3 MFC set to  0.000000
4/15/2011	10:56:16 AM	PHl3 MFC set to  0.000000
4/15/2011	10:56:16 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:56:16 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:56:16 AM	Tube furnace set to 0
4/15/2011	10:57:16 AM	H2 valve closed
4/15/2011	10:57:16 AM	BCl3 valve closed
4/15/2011	10:57:16 AM	PH3 valve closed
4/15/2011	10:57:16 AM	SiCl4 pre valve closed
4/15/2011	10:57:16 AM	SiCl4 post valve closed
4/15/2011	10:57:16 AM	Bubbler valve closed
4/15/2011	10:57:16 AM	Helium valve opened
4/15/2011	10:57:16 AM	Main Vac valve opened
4/15/2011	10:57:16 AM	Bypass valve opened
4/15/2011	10:57:16 AM	Helium MFC set to  100.000000
4/15/2011	10:57:16 AM	H2 MFC set to  0.000000
4/15/2011	10:57:16 AM	BCl3 MFC set to  0.000000
4/15/2011	10:57:16 AM	PHl3 MFC set to  0.000000
4/15/2011	10:57:16 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:57:16 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:57:17 AM	Tube furnace set to 0
4/15/2011	10:58:17 AM	Helium valve closed
4/15/2011	10:58:17 AM	H2 valve closed
4/15/2011	10:58:17 AM	BCl3 valve closed
4/15/2011	10:58:17 AM	PH3 valve closed
4/15/2011	10:58:17 AM	SiCl4 pre valve closed
4/15/2011	10:58:17 AM	SiCl4 post valve closed
4/15/2011	10:58:17 AM	Bubbler valve closed
4/15/2011	10:58:17 AM	Main Vac valve opened
4/15/2011	10:58:17 AM	Bypass valve opened
4/15/2011	10:58:17 AM	Helium MFC set to  0.000000
4/15/2011	10:58:17 AM	H2 MFC set to  0.000000
4/15/2011	10:58:17 AM	BCl3 MFC set to  0.000000
4/15/2011	10:58:17 AM	PHl3 MFC set to  0.000000
4/15/2011	10:58:17 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:58:17 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:58:17 AM	Tube furnace set to 0
4/15/2011	10:59:17 AM	H2 valve closed
4/15/2011	10:59:17 AM	BCl3 valve closed
4/15/2011	10:59:17 AM	PH3 valve closed
4/15/2011	10:59:17 AM	SiCl4 pre valve closed
4/15/2011	10:59:17 AM	SiCl4 post valve closed
4/15/2011	10:59:17 AM	Bubbler valve closed
4/15/2011	10:59:17 AM	Helium valve opened
4/15/2011	10:59:17 AM	Main Vac valve opened
4/15/2011	10:59:17 AM	Bypass valve opened
4/15/2011	10:59:17 AM	Helium MFC set to  100.000000
4/15/2011	10:59:17 AM	H2 MFC set to  0.000000
4/15/2011	10:59:17 AM	BCl3 MFC set to  0.000000
4/15/2011	10:59:17 AM	PHl3 MFC set to  0.000000
4/15/2011	10:59:17 AM	SiCl4 MFC set to  0.000000
4/15/2011	10:59:17 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	10:59:17 AM	Tube furnace set to 0
4/15/2011	11:00:17 AM	Helium valve closed
4/15/2011	11:00:17 AM	H2 valve closed
4/15/2011	11:00:17 AM	BCl3 valve closed
4/15/2011	11:00:17 AM	PH3 valve closed
4/15/2011	11:00:17 AM	SiCl4 pre valve closed
4/15/2011	11:00:17 AM	SiCl4 post valve closed
4/15/2011	11:00:17 AM	Bubbler valve closed
4/15/2011	11:00:17 AM	Main Vac valve opened
4/15/2011	11:00:17 AM	Bypass valve opened
4/15/2011	11:00:17 AM	Helium MFC set to  0.000000
4/15/2011	11:00:17 AM	H2 MFC set to  0.000000
4/15/2011	11:00:17 AM	BCl3 MFC set to  0.000000
4/15/2011	11:00:17 AM	PHl3 MFC set to  0.000000
4/15/2011	11:00:17 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:00:17 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:00:17 AM	Tube furnace set to 0
4/15/2011	11:01:17 AM	H2 valve closed
4/15/2011	11:01:17 AM	BCl3 valve closed
4/15/2011	11:01:17 AM	PH3 valve closed
4/15/2011	11:01:17 AM	SiCl4 pre valve closed
4/15/2011	11:01:17 AM	SiCl4 post valve closed
4/15/2011	11:01:17 AM	Bubbler valve closed
4/15/2011	11:01:17 AM	Helium valve opened
4/15/2011	11:01:17 AM	Main Vac valve opened
4/15/2011	11:01:17 AM	Bypass valve opened
4/15/2011	11:01:17 AM	Helium MFC set to  100.000000
4/15/2011	11:01:17 AM	H2 MFC set to  0.000000
4/15/2011	11:01:17 AM	BCl3 MFC set to  0.000000
4/15/2011	11:01:17 AM	PHl3 MFC set to  0.000000
4/15/2011	11:01:17 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:01:17 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:01:17 AM	Tube furnace set to 0
4/15/2011	11:02:17 AM	Helium valve closed
4/15/2011	11:02:17 AM	H2 valve closed
4/15/2011	11:02:17 AM	BCl3 valve closed
4/15/2011	11:02:17 AM	PH3 valve closed
4/15/2011	11:02:17 AM	SiCl4 pre valve closed
4/15/2011	11:02:17 AM	SiCl4 post valve closed
4/15/2011	11:02:17 AM	Bubbler valve closed
4/15/2011	11:02:17 AM	Main Vac valve opened
4/15/2011	11:02:17 AM	Bypass valve opened
4/15/2011	11:02:17 AM	Helium MFC set to  0.000000
4/15/2011	11:02:17 AM	H2 MFC set to  0.000000
4/15/2011	11:02:17 AM	BCl3 MFC set to  0.000000
4/15/2011	11:02:17 AM	PHl3 MFC set to  0.000000
4/15/2011	11:02:17 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:02:17 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:02:18 AM	Tube furnace set to 0
4/15/2011	11:03:18 AM	H2 valve closed
4/15/2011	11:03:18 AM	BCl3 valve closed
4/15/2011	11:03:18 AM	PH3 valve closed
4/15/2011	11:03:18 AM	SiCl4 pre valve closed
4/15/2011	11:03:18 AM	SiCl4 post valve closed
4/15/2011	11:03:18 AM	Bubbler valve closed
4/15/2011	11:03:18 AM	Helium valve opened
4/15/2011	11:03:18 AM	Main Vac valve opened
4/15/2011	11:03:18 AM	Bypass valve opened
4/15/2011	11:03:18 AM	Helium MFC set to  100.000000
4/15/2011	11:03:18 AM	H2 MFC set to  0.000000
4/15/2011	11:03:18 AM	BCl3 MFC set to  0.000000
4/15/2011	11:03:18 AM	PHl3 MFC set to  0.000000
4/15/2011	11:03:18 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:03:18 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:03:18 AM	Tube furnace set to 0
4/15/2011	11:04:18 AM	Helium valve closed
4/15/2011	11:04:18 AM	H2 valve closed
4/15/2011	11:04:18 AM	BCl3 valve closed
4/15/2011	11:04:18 AM	PH3 valve closed
4/15/2011	11:04:18 AM	SiCl4 pre valve closed
4/15/2011	11:04:18 AM	SiCl4 post valve closed
4/15/2011	11:04:18 AM	Bubbler valve closed
4/15/2011	11:04:18 AM	Main Vac valve opened
4/15/2011	11:04:18 AM	Bypass valve opened
4/15/2011	11:04:18 AM	Helium MFC set to  0.000000
4/15/2011	11:04:18 AM	H2 MFC set to  0.000000
4/15/2011	11:04:18 AM	BCl3 MFC set to  0.000000
4/15/2011	11:04:18 AM	PHl3 MFC set to  0.000000
4/15/2011	11:04:18 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:04:18 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:04:18 AM	Tube furnace set to 0
4/15/2011	11:04:19 AM	Run finished at 11:04 AM
4/15/2011	11:04:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/15/2011	11:08:49 AM	Helium valve opened
4/15/2011	11:08:52 AM	Helium MFC set to  100.000000
4/15/2011	11:09:42 AM	Helium MFC set to  0.000000
4/15/2011	11:09:44 AM	Helium valve closed
4/15/2011	11:10:40 AM	Recipe started at 11:10 AM
4/15/2011	11:10:40 AM	Helium valve closed
4/15/2011	11:10:40 AM	BCl3 valve closed
4/15/2011	11:10:40 AM	PH3 valve closed
4/15/2011	11:10:40 AM	SiCl4 pre valve closed
4/15/2011	11:10:40 AM	SiCl4 post valve closed
4/15/2011	11:10:40 AM	Main Vac valve closed
4/15/2011	11:10:40 AM	Bypass valve closed
4/15/2011	11:10:40 AM	Bubbler valve closed
4/15/2011	11:10:40 AM	H2 valve opened
4/15/2011	11:10:40 AM	Helium MFC set to  0.000000
4/15/2011	11:10:40 AM	H2 MFC set to  500.000000
4/15/2011	11:10:40 AM	BCl3 MFC set to  0.000000
4/15/2011	11:10:40 AM	PHl3 MFC set to  0.000000
4/15/2011	11:10:40 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:10:40 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:10:40 AM	Tube furnace set to 0
4/15/2011	11:11:57 AM	Helium valve closed
4/15/2011	11:11:57 AM	BCl3 valve closed
4/15/2011	11:11:57 AM	PH3 valve closed
4/15/2011	11:11:57 AM	SiCl4 pre valve closed
4/15/2011	11:11:57 AM	SiCl4 post valve closed
4/15/2011	11:11:57 AM	Main Vac valve closed
4/15/2011	11:11:57 AM	Bypass valve closed
4/15/2011	11:11:57 AM	H2 valve opened
4/15/2011	11:11:57 AM	Bubbler valve opened
4/15/2011	11:11:57 AM	Helium MFC set to  0.000000
4/15/2011	11:11:57 AM	H2 MFC set to  500.000000
4/15/2011	11:11:57 AM	BCl3 MFC set to  0.000000
4/15/2011	11:11:57 AM	PHl3 MFC set to  0.000000
4/15/2011	11:11:57 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:11:57 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:11:58 AM	Tube furnace set to 1000
4/15/2011	11:31:58 AM	Helium valve closed
4/15/2011	11:31:58 AM	PH3 valve closed
4/15/2011	11:31:58 AM	Main Vac valve closed
4/15/2011	11:31:58 AM	Bypass valve closed
4/15/2011	11:31:58 AM	H2 valve opened
4/15/2011	11:31:58 AM	BCl3 valve opened
4/15/2011	11:31:58 AM	SiCl4 pre valve opened
4/15/2011	11:31:58 AM	SiCl4 post valve opened
4/15/2011	11:31:58 AM	Bubbler valve opened
4/15/2011	11:31:58 AM	Helium MFC set to  0.000000
4/15/2011	11:31:58 AM	H2 MFC set to  500.000000
4/15/2011	11:31:58 AM	BCl3 MFC set to  3.000000
4/15/2011	11:31:58 AM	PHl3 MFC set to  0.000000
4/15/2011	11:31:58 AM	SiCl4 MFC set to  50.000000
4/15/2011	11:31:58 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:31:58 AM	Tube furnace set to 1000
4/15/2011	11:41:58 AM	Helium valve closed
4/15/2011	11:41:58 AM	BCl3 valve closed
4/15/2011	11:41:58 AM	PH3 valve closed
4/15/2011	11:41:58 AM	SiCl4 pre valve closed
4/15/2011	11:41:58 AM	SiCl4 post valve closed
4/15/2011	11:41:58 AM	Main Vac valve closed
4/15/2011	11:41:58 AM	Bypass valve closed
4/15/2011	11:41:58 AM	H2 valve opened
4/15/2011	11:41:58 AM	Bubbler valve opened
4/15/2011	11:41:58 AM	Helium MFC set to  0.000000
4/15/2011	11:41:58 AM	H2 MFC set to  500.000000
4/15/2011	11:41:58 AM	BCl3 MFC set to  0.000000
4/15/2011	11:41:58 AM	PHl3 MFC set to  0.000000
4/15/2011	11:41:58 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:41:58 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:41:58 AM	Tube furnace set to 1055
4/15/2011	11:44:00 AM	Helium valve closed
4/15/2011	11:44:00 AM	BCl3 valve closed
4/15/2011	11:44:00 AM	PH3 valve closed
4/15/2011	11:44:00 AM	SiCl4 pre valve closed
4/15/2011	11:44:00 AM	SiCl4 post valve closed
4/15/2011	11:44:00 AM	Main Vac valve closed
4/15/2011	11:44:00 AM	Bypass valve closed
4/15/2011	11:44:00 AM	H2 valve opened
4/15/2011	11:44:00 AM	Bubbler valve opened
4/15/2011	11:44:00 AM	Helium MFC set to  0.000000
4/15/2011	11:44:00 AM	H2 MFC set to  500.000000
4/15/2011	11:44:00 AM	BCl3 MFC set to  0.000000
4/15/2011	11:44:00 AM	PHl3 MFC set to  0.000000
4/15/2011	11:44:00 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:44:00 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:44:00 AM	Tube furnace set to 1055
4/15/2011	11:54:00 AM	Helium valve closed
4/15/2011	11:54:00 AM	BCl3 valve closed
4/15/2011	11:54:00 AM	PH3 valve closed
4/15/2011	11:54:00 AM	SiCl4 pre valve closed
4/15/2011	11:54:00 AM	SiCl4 post valve closed
4/15/2011	11:54:00 AM	Main Vac valve closed
4/15/2011	11:54:00 AM	Bypass valve closed
4/15/2011	11:54:00 AM	H2 valve opened
4/15/2011	11:54:00 AM	Bubbler valve opened
4/15/2011	11:54:00 AM	Helium MFC set to  0.000000
4/15/2011	11:54:00 AM	H2 MFC set to  500.000000
4/15/2011	11:54:00 AM	BCl3 MFC set to  0.000000
4/15/2011	11:54:00 AM	PHl3 MFC set to  0.000000
4/15/2011	11:54:00 AM	SiCl4 MFC set to  0.000000
4/15/2011	11:54:00 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:54:00 AM	Tube furnace set to 1000
4/15/2011	11:55:27 AM	Helium valve closed
4/15/2011	11:55:27 AM	PH3 valve closed
4/15/2011	11:55:27 AM	Main Vac valve closed
4/15/2011	11:55:28 AM	Bypass valve closed
4/15/2011	11:55:28 AM	H2 valve opened
4/15/2011	11:55:28 AM	BCl3 valve opened
4/15/2011	11:55:28 AM	SiCl4 pre valve opened
4/15/2011	11:55:28 AM	SiCl4 post valve opened
4/15/2011	11:55:28 AM	Bubbler valve opened
4/15/2011	11:55:28 AM	Helium MFC set to  0.000000
4/15/2011	11:55:28 AM	H2 MFC set to  500.000000
4/15/2011	11:55:28 AM	BCl3 MFC set to  3.000000
4/15/2011	11:55:28 AM	PHl3 MFC set to  0.000000
4/15/2011	11:55:28 AM	SiCl4 MFC set to  50.000000
4/15/2011	11:55:28 AM	Bypass solenoid MFC set to  0.000000
4/15/2011	11:55:28 AM	Tube furnace set to 1000
4/15/2011	12:05:28 PM	H2 valve closed
4/15/2011	12:05:28 PM	BCl3 valve closed
4/15/2011	12:05:28 PM	PH3 valve closed
4/15/2011	12:05:28 PM	SiCl4 pre valve closed
4/15/2011	12:05:28 PM	SiCl4 post valve closed
4/15/2011	12:05:28 PM	Main Vac valve closed
4/15/2011	12:05:28 PM	Bypass valve closed
4/15/2011	12:05:28 PM	Helium valve opened
4/15/2011	12:05:28 PM	Bubbler valve opened
4/15/2011	12:05:28 PM	Helium MFC set to  500.000000
4/15/2011	12:05:28 PM	H2 MFC set to  0.000000
4/15/2011	12:05:28 PM	BCl3 MFC set to  0.000000
4/15/2011	12:05:28 PM	PHl3 MFC set to  0.000000
4/15/2011	12:05:28 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:05:28 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:05:28 PM	Tube furnace set to 0
4/15/2011	12:25:28 PM	Helium valve closed
4/15/2011	12:25:28 PM	H2 valve closed
4/15/2011	12:25:28 PM	BCl3 valve closed
4/15/2011	12:25:28 PM	PH3 valve closed
4/15/2011	12:25:28 PM	SiCl4 pre valve closed
4/15/2011	12:25:28 PM	SiCl4 post valve closed
4/15/2011	12:25:28 PM	Main Vac valve closed
4/15/2011	12:25:28 PM	Bypass valve closed
4/15/2011	12:25:28 PM	Bubbler valve closed
4/15/2011	12:25:28 PM	Helium MFC set to  0.000000
4/15/2011	12:25:28 PM	H2 MFC set to  0.000000
4/15/2011	12:25:28 PM	BCl3 MFC set to  0.000000
4/15/2011	12:25:28 PM	PHl3 MFC set to  0.000000
4/15/2011	12:25:28 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:25:28 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:25:28 PM	Tube furnace set to 0
4/15/2011	12:25:28 PM	Run finished at 12:25 PM
4/15/2011	12:26:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	12:26:43 PM	Recipe started at 12:26 PM
4/15/2011	12:26:43 PM	H2 valve closed
4/15/2011	12:26:43 PM	BCl3 valve closed
4/15/2011	12:26:43 PM	PH3 valve closed
4/15/2011	12:26:43 PM	SiCl4 pre valve closed
4/15/2011	12:26:43 PM	SiCl4 post valve closed
4/15/2011	12:26:43 PM	Main Vac valve closed
4/15/2011	12:26:43 PM	Bypass valve closed
4/15/2011	12:26:43 PM	Bubbler valve closed
4/15/2011	12:26:43 PM	Helium valve opened
4/15/2011	12:26:43 PM	Helium MFC set to  500.000000
4/15/2011	12:26:43 PM	H2 MFC set to  0.000000
4/15/2011	12:26:43 PM	BCl3 MFC set to  0.000000
4/15/2011	12:26:43 PM	PHl3 MFC set to  0.000000
4/15/2011	12:26:43 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:26:43 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:26:44 PM	Tube furnace set to 0
4/15/2011	12:26:44 PM	Helium valve closed
4/15/2011	12:26:44 PM	H2 valve closed
4/15/2011	12:26:44 PM	BCl3 valve closed
4/15/2011	12:26:44 PM	PH3 valve closed
4/15/2011	12:26:44 PM	SiCl4 pre valve closed
4/15/2011	12:26:44 PM	SiCl4 post valve closed
4/15/2011	12:26:44 PM	Main Vac valve closed
4/15/2011	12:26:44 PM	Bypass valve closed
4/15/2011	12:26:44 PM	Bubbler valve closed
4/15/2011	12:26:44 PM	Helium MFC set to  0.000000
4/15/2011	12:26:44 PM	H2 MFC set to  0.000000
4/15/2011	12:26:44 PM	BCl3 MFC set to  0.000000
4/15/2011	12:26:44 PM	PHl3 MFC set to  0.000000
4/15/2011	12:26:44 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:26:44 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:26:44 PM	Tube furnace set to 0
4/15/2011	12:26:44 PM	Run finished at 12:26 PM
4/15/2011	12:26:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	12:30:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	12:30:35 PM	Recipe started at 12:30 PM
4/15/2011	12:30:35 PM	Helium valve closed
4/15/2011	12:30:35 PM	H2 valve closed
4/15/2011	12:30:35 PM	BCl3 valve closed
4/15/2011	12:30:35 PM	PH3 valve closed
4/15/2011	12:30:35 PM	SiCl4 pre valve closed
4/15/2011	12:30:35 PM	SiCl4 post valve closed
4/15/2011	12:30:35 PM	Main Vac valve closed
4/15/2011	12:30:35 PM	Bubbler valve closed
4/15/2011	12:30:35 PM	Bypass valve opened
4/15/2011	12:30:35 PM	Helium MFC set to  0.000000
4/15/2011	12:30:35 PM	H2 MFC set to  0.000000
4/15/2011	12:30:35 PM	BCl3 MFC set to  0.000000
4/15/2011	12:30:35 PM	PHl3 MFC set to  0.000000
4/15/2011	12:30:35 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:30:35 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:30:36 PM	Tube furnace set to 0
4/15/2011	12:31:05 PM	Helium valve closed
4/15/2011	12:31:05 PM	H2 valve closed
4/15/2011	12:31:05 PM	BCl3 valve closed
4/15/2011	12:31:05 PM	PH3 valve closed
4/15/2011	12:31:05 PM	SiCl4 pre valve closed
4/15/2011	12:31:05 PM	SiCl4 post valve closed
4/15/2011	12:31:05 PM	Bubbler valve closed
4/15/2011	12:31:05 PM	Main Vac valve opened
4/15/2011	12:31:05 PM	Bypass valve opened
4/15/2011	12:31:05 PM	Helium MFC set to  0.000000
4/15/2011	12:31:05 PM	H2 MFC set to  0.000000
4/15/2011	12:31:05 PM	BCl3 MFC set to  0.000000
4/15/2011	12:31:05 PM	PHl3 MFC set to  0.000000
4/15/2011	12:31:05 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:31:05 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:31:06 PM	Tube furnace set to 0
4/15/2011	12:31:06 PM	Run finished at 12:31 PM
4/15/2011	12:31:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	12:32:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/15/2011	12:32:19 PM	Recipe started at 12:32 PM
4/15/2011	12:32:19 PM	Helium valve closed
4/15/2011	12:32:19 PM	H2 valve closed
4/15/2011	12:32:19 PM	BCl3 valve closed
4/15/2011	12:32:19 PM	PH3 valve closed
4/15/2011	12:32:19 PM	SiCl4 pre valve closed
4/15/2011	12:32:19 PM	SiCl4 post valve closed
4/15/2011	12:32:19 PM	Main Vac valve closed
4/15/2011	12:32:19 PM	Bubbler valve closed
4/15/2011	12:32:19 PM	Bypass valve opened
4/15/2011	12:32:19 PM	Helium MFC set to  0.000000
4/15/2011	12:32:19 PM	H2 MFC set to  0.000000
4/15/2011	12:32:19 PM	BCl3 MFC set to  0.000000
4/15/2011	12:32:19 PM	PHl3 MFC set to  0.000000
4/15/2011	12:32:19 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:32:19 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:32:20 PM	Tube furnace set to 0
4/15/2011	12:32:20 PM	Helium valve closed
4/15/2011	12:32:20 PM	H2 valve closed
4/15/2011	12:32:20 PM	BCl3 valve closed
4/15/2011	12:32:20 PM	PH3 valve closed
4/15/2011	12:32:20 PM	SiCl4 pre valve closed
4/15/2011	12:32:20 PM	SiCl4 post valve closed
4/15/2011	12:32:20 PM	Bubbler valve closed
4/15/2011	12:32:20 PM	Main Vac valve opened
4/15/2011	12:32:20 PM	Bypass valve opened
4/15/2011	12:32:20 PM	Helium MFC set to  0.000000
4/15/2011	12:32:20 PM	H2 MFC set to  0.000000
4/15/2011	12:32:20 PM	BCl3 MFC set to  0.000000
4/15/2011	12:32:20 PM	PHl3 MFC set to  0.000000
4/15/2011	12:32:20 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:32:20 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:32:20 PM	Tube furnace set to 0
4/15/2011	12:33:20 PM	H2 valve closed
4/15/2011	12:33:20 PM	BCl3 valve closed
4/15/2011	12:33:20 PM	PH3 valve closed
4/15/2011	12:33:20 PM	SiCl4 pre valve closed
4/15/2011	12:33:20 PM	SiCl4 post valve closed
4/15/2011	12:33:20 PM	Bubbler valve closed
4/15/2011	12:33:20 PM	Helium valve opened
4/15/2011	12:33:20 PM	Main Vac valve opened
4/15/2011	12:33:20 PM	Bypass valve opened
4/15/2011	12:33:20 PM	Helium MFC set to  100.000000
4/15/2011	12:33:20 PM	H2 MFC set to  0.000000
4/15/2011	12:33:20 PM	BCl3 MFC set to  0.000000
4/15/2011	12:33:20 PM	PHl3 MFC set to  0.000000
4/15/2011	12:33:20 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:33:20 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:33:20 PM	Tube furnace set to 0
4/15/2011	12:34:20 PM	Helium valve closed
4/15/2011	12:34:20 PM	H2 valve closed
4/15/2011	12:34:20 PM	BCl3 valve closed
4/15/2011	12:34:20 PM	PH3 valve closed
4/15/2011	12:34:20 PM	SiCl4 pre valve closed
4/15/2011	12:34:20 PM	SiCl4 post valve closed
4/15/2011	12:34:20 PM	Bubbler valve closed
4/15/2011	12:34:20 PM	Main Vac valve opened
4/15/2011	12:34:20 PM	Bypass valve opened
4/15/2011	12:34:20 PM	Helium MFC set to  0.000000
4/15/2011	12:34:20 PM	H2 MFC set to  0.000000
4/15/2011	12:34:20 PM	BCl3 MFC set to  0.000000
4/15/2011	12:34:20 PM	PHl3 MFC set to  0.000000
4/15/2011	12:34:20 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:34:20 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:34:20 PM	Tube furnace set to 0
4/15/2011	12:35:20 PM	H2 valve closed
4/15/2011	12:35:20 PM	BCl3 valve closed
4/15/2011	12:35:20 PM	PH3 valve closed
4/15/2011	12:35:20 PM	SiCl4 pre valve closed
4/15/2011	12:35:20 PM	SiCl4 post valve closed
4/15/2011	12:35:20 PM	Bubbler valve closed
4/15/2011	12:35:20 PM	Helium valve opened
4/15/2011	12:35:20 PM	Main Vac valve opened
4/15/2011	12:35:20 PM	Bypass valve opened
4/15/2011	12:35:20 PM	Helium MFC set to  100.000000
4/15/2011	12:35:20 PM	H2 MFC set to  0.000000
4/15/2011	12:35:20 PM	BCl3 MFC set to  0.000000
4/15/2011	12:35:20 PM	PHl3 MFC set to  0.000000
4/15/2011	12:35:20 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:35:20 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:35:21 PM	Tube furnace set to 0
4/15/2011	12:36:21 PM	Helium valve closed
4/15/2011	12:36:21 PM	H2 valve closed
4/15/2011	12:36:21 PM	BCl3 valve closed
4/15/2011	12:36:21 PM	PH3 valve closed
4/15/2011	12:36:21 PM	SiCl4 pre valve closed
4/15/2011	12:36:21 PM	SiCl4 post valve closed
4/15/2011	12:36:21 PM	Bubbler valve closed
4/15/2011	12:36:21 PM	Main Vac valve opened
4/15/2011	12:36:21 PM	Bypass valve opened
4/15/2011	12:36:21 PM	Helium MFC set to  0.000000
4/15/2011	12:36:21 PM	H2 MFC set to  0.000000
4/15/2011	12:36:21 PM	BCl3 MFC set to  0.000000
4/15/2011	12:36:21 PM	PHl3 MFC set to  0.000000
4/15/2011	12:36:21 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:36:21 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:36:21 PM	Tube furnace set to 0
4/15/2011	12:37:21 PM	H2 valve closed
4/15/2011	12:37:21 PM	BCl3 valve closed
4/15/2011	12:37:21 PM	PH3 valve closed
4/15/2011	12:37:21 PM	SiCl4 pre valve closed
4/15/2011	12:37:21 PM	SiCl4 post valve closed
4/15/2011	12:37:21 PM	Bubbler valve closed
4/15/2011	12:37:21 PM	Helium valve opened
4/15/2011	12:37:21 PM	Main Vac valve opened
4/15/2011	12:37:21 PM	Bypass valve opened
4/15/2011	12:37:21 PM	Helium MFC set to  100.000000
4/15/2011	12:37:21 PM	H2 MFC set to  0.000000
4/15/2011	12:37:21 PM	BCl3 MFC set to  0.000000
4/15/2011	12:37:21 PM	PHl3 MFC set to  0.000000
4/15/2011	12:37:21 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:37:21 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:37:21 PM	Tube furnace set to 0
4/15/2011	12:38:21 PM	Helium valve closed
4/15/2011	12:38:21 PM	H2 valve closed
4/15/2011	12:38:21 PM	BCl3 valve closed
4/15/2011	12:38:21 PM	PH3 valve closed
4/15/2011	12:38:21 PM	SiCl4 pre valve closed
4/15/2011	12:38:21 PM	SiCl4 post valve closed
4/15/2011	12:38:21 PM	Bubbler valve closed
4/15/2011	12:38:21 PM	Main Vac valve opened
4/15/2011	12:38:21 PM	Bypass valve opened
4/15/2011	12:38:21 PM	Helium MFC set to  0.000000
4/15/2011	12:38:21 PM	H2 MFC set to  0.000000
4/15/2011	12:38:21 PM	BCl3 MFC set to  0.000000
4/15/2011	12:38:21 PM	PHl3 MFC set to  0.000000
4/15/2011	12:38:21 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:38:21 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:38:21 PM	Tube furnace set to 0
4/15/2011	12:39:21 PM	H2 valve closed
4/15/2011	12:39:21 PM	BCl3 valve closed
4/15/2011	12:39:21 PM	PH3 valve closed
4/15/2011	12:39:21 PM	SiCl4 pre valve closed
4/15/2011	12:39:21 PM	SiCl4 post valve closed
4/15/2011	12:39:21 PM	Bubbler valve closed
4/15/2011	12:39:21 PM	Helium valve opened
4/15/2011	12:39:21 PM	Main Vac valve opened
4/15/2011	12:39:21 PM	Bypass valve opened
4/15/2011	12:39:21 PM	Helium MFC set to  100.000000
4/15/2011	12:39:21 PM	H2 MFC set to  0.000000
4/15/2011	12:39:21 PM	BCl3 MFC set to  0.000000
4/15/2011	12:39:21 PM	PHl3 MFC set to  0.000000
4/15/2011	12:39:21 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:39:21 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:39:21 PM	Tube furnace set to 0
4/15/2011	12:40:21 PM	Helium valve closed
4/15/2011	12:40:21 PM	H2 valve closed
4/15/2011	12:40:21 PM	BCl3 valve closed
4/15/2011	12:40:21 PM	PH3 valve closed
4/15/2011	12:40:21 PM	SiCl4 pre valve closed
4/15/2011	12:40:21 PM	SiCl4 post valve closed
4/15/2011	12:40:21 PM	Bubbler valve closed
4/15/2011	12:40:21 PM	Main Vac valve opened
4/15/2011	12:40:21 PM	Bypass valve opened
4/15/2011	12:40:21 PM	Helium MFC set to  0.000000
4/15/2011	12:40:21 PM	H2 MFC set to  0.000000
4/15/2011	12:40:21 PM	BCl3 MFC set to  0.000000
4/15/2011	12:40:21 PM	PHl3 MFC set to  0.000000
4/15/2011	12:40:21 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:40:21 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:40:22 PM	Tube furnace set to 0
4/15/2011	12:41:22 PM	H2 valve closed
4/15/2011	12:41:22 PM	BCl3 valve closed
4/15/2011	12:41:22 PM	PH3 valve closed
4/15/2011	12:41:22 PM	SiCl4 pre valve closed
4/15/2011	12:41:22 PM	SiCl4 post valve closed
4/15/2011	12:41:22 PM	Bubbler valve closed
4/15/2011	12:41:22 PM	Helium valve opened
4/15/2011	12:41:22 PM	Main Vac valve opened
4/15/2011	12:41:22 PM	Bypass valve opened
4/15/2011	12:41:22 PM	Helium MFC set to  100.000000
4/15/2011	12:41:22 PM	H2 MFC set to  0.000000
4/15/2011	12:41:22 PM	BCl3 MFC set to  0.000000
4/15/2011	12:41:22 PM	PHl3 MFC set to  0.000000
4/15/2011	12:41:22 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:41:22 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:41:22 PM	Tube furnace set to 0
4/15/2011	12:42:22 PM	Helium valve closed
4/15/2011	12:42:22 PM	H2 valve closed
4/15/2011	12:42:22 PM	BCl3 valve closed
4/15/2011	12:42:22 PM	PH3 valve closed
4/15/2011	12:42:22 PM	SiCl4 pre valve closed
4/15/2011	12:42:22 PM	SiCl4 post valve closed
4/15/2011	12:42:22 PM	Bubbler valve closed
4/15/2011	12:42:22 PM	Main Vac valve opened
4/15/2011	12:42:22 PM	Bypass valve opened
4/15/2011	12:42:22 PM	Helium MFC set to  0.000000
4/15/2011	12:42:22 PM	H2 MFC set to  0.000000
4/15/2011	12:42:22 PM	BCl3 MFC set to  0.000000
4/15/2011	12:42:22 PM	PHl3 MFC set to  0.000000
4/15/2011	12:42:22 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:42:22 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:42:22 PM	Tube furnace set to 0
4/15/2011	12:43:22 PM	H2 valve closed
4/15/2011	12:43:22 PM	BCl3 valve closed
4/15/2011	12:43:22 PM	PH3 valve closed
4/15/2011	12:43:22 PM	SiCl4 pre valve closed
4/15/2011	12:43:22 PM	SiCl4 post valve closed
4/15/2011	12:43:22 PM	Bubbler valve closed
4/15/2011	12:43:22 PM	Helium valve opened
4/15/2011	12:43:22 PM	Main Vac valve opened
4/15/2011	12:43:22 PM	Bypass valve opened
4/15/2011	12:43:22 PM	Helium MFC set to  100.000000
4/15/2011	12:43:22 PM	H2 MFC set to  0.000000
4/15/2011	12:43:22 PM	BCl3 MFC set to  0.000000
4/15/2011	12:43:22 PM	PHl3 MFC set to  0.000000
4/15/2011	12:43:22 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:43:22 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:43:22 PM	Tube furnace set to 0
4/15/2011	12:44:22 PM	Helium valve closed
4/15/2011	12:44:22 PM	H2 valve closed
4/15/2011	12:44:22 PM	BCl3 valve closed
4/15/2011	12:44:22 PM	PH3 valve closed
4/15/2011	12:44:22 PM	SiCl4 pre valve closed
4/15/2011	12:44:22 PM	SiCl4 post valve closed
4/15/2011	12:44:22 PM	Bubbler valve closed
4/15/2011	12:44:22 PM	Main Vac valve opened
4/15/2011	12:44:22 PM	Bypass valve opened
4/15/2011	12:44:22 PM	Helium MFC set to  0.000000
4/15/2011	12:44:22 PM	H2 MFC set to  0.000000
4/15/2011	12:44:22 PM	BCl3 MFC set to  0.000000
4/15/2011	12:44:22 PM	PHl3 MFC set to  0.000000
4/15/2011	12:44:22 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:44:22 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:44:22 PM	Tube furnace set to 0
4/15/2011	12:45:22 PM	H2 valve closed
4/15/2011	12:45:22 PM	BCl3 valve closed
4/15/2011	12:45:22 PM	PH3 valve closed
4/15/2011	12:45:22 PM	SiCl4 pre valve closed
4/15/2011	12:45:22 PM	SiCl4 post valve closed
4/15/2011	12:45:22 PM	Bubbler valve closed
4/15/2011	12:45:22 PM	Helium valve opened
4/15/2011	12:45:22 PM	Main Vac valve opened
4/15/2011	12:45:22 PM	Bypass valve opened
4/15/2011	12:45:22 PM	Helium MFC set to  100.000000
4/15/2011	12:45:22 PM	H2 MFC set to  0.000000
4/15/2011	12:45:22 PM	BCl3 MFC set to  0.000000
4/15/2011	12:45:22 PM	PHl3 MFC set to  0.000000
4/15/2011	12:45:22 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:45:22 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:45:23 PM	Tube furnace set to 0
4/15/2011	12:46:23 PM	Helium valve closed
4/15/2011	12:46:23 PM	H2 valve closed
4/15/2011	12:46:23 PM	BCl3 valve closed
4/15/2011	12:46:23 PM	PH3 valve closed
4/15/2011	12:46:23 PM	SiCl4 pre valve closed
4/15/2011	12:46:23 PM	SiCl4 post valve closed
4/15/2011	12:46:23 PM	Bubbler valve closed
4/15/2011	12:46:23 PM	Main Vac valve opened
4/15/2011	12:46:23 PM	Bypass valve opened
4/15/2011	12:46:23 PM	Helium MFC set to  0.000000
4/15/2011	12:46:23 PM	H2 MFC set to  0.000000
4/15/2011	12:46:23 PM	BCl3 MFC set to  0.000000
4/15/2011	12:46:23 PM	PHl3 MFC set to  0.000000
4/15/2011	12:46:23 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:46:23 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:46:23 PM	Tube furnace set to 0
4/15/2011	12:47:23 PM	H2 valve closed
4/15/2011	12:47:23 PM	BCl3 valve closed
4/15/2011	12:47:23 PM	PH3 valve closed
4/15/2011	12:47:23 PM	SiCl4 pre valve closed
4/15/2011	12:47:23 PM	SiCl4 post valve closed
4/15/2011	12:47:23 PM	Bubbler valve closed
4/15/2011	12:47:23 PM	Helium valve opened
4/15/2011	12:47:23 PM	Main Vac valve opened
4/15/2011	12:47:23 PM	Bypass valve opened
4/15/2011	12:47:23 PM	Helium MFC set to  100.000000
4/15/2011	12:47:23 PM	H2 MFC set to  0.000000
4/15/2011	12:47:23 PM	BCl3 MFC set to  0.000000
4/15/2011	12:47:23 PM	PHl3 MFC set to  0.000000
4/15/2011	12:47:23 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:47:23 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:47:23 PM	Tube furnace set to 0
4/15/2011	12:48:23 PM	Helium valve closed
4/15/2011	12:48:23 PM	H2 valve closed
4/15/2011	12:48:23 PM	BCl3 valve closed
4/15/2011	12:48:23 PM	PH3 valve closed
4/15/2011	12:48:23 PM	SiCl4 pre valve closed
4/15/2011	12:48:23 PM	SiCl4 post valve closed
4/15/2011	12:48:23 PM	Bubbler valve closed
4/15/2011	12:48:23 PM	Main Vac valve opened
4/15/2011	12:48:23 PM	Bypass valve opened
4/15/2011	12:48:23 PM	Helium MFC set to  0.000000
4/15/2011	12:48:23 PM	H2 MFC set to  0.000000
4/15/2011	12:48:23 PM	BCl3 MFC set to  0.000000
4/15/2011	12:48:23 PM	PHl3 MFC set to  0.000000
4/15/2011	12:48:23 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:48:23 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:48:23 PM	Tube furnace set to 0
4/15/2011	12:49:23 PM	H2 valve closed
4/15/2011	12:49:23 PM	BCl3 valve closed
4/15/2011	12:49:23 PM	PH3 valve closed
4/15/2011	12:49:23 PM	SiCl4 pre valve closed
4/15/2011	12:49:23 PM	SiCl4 post valve closed
4/15/2011	12:49:23 PM	Bubbler valve closed
4/15/2011	12:49:23 PM	Helium valve opened
4/15/2011	12:49:23 PM	Main Vac valve opened
4/15/2011	12:49:23 PM	Bypass valve opened
4/15/2011	12:49:23 PM	Helium MFC set to  100.000000
4/15/2011	12:49:23 PM	H2 MFC set to  0.000000
4/15/2011	12:49:23 PM	BCl3 MFC set to  0.000000
4/15/2011	12:49:23 PM	PHl3 MFC set to  0.000000
4/15/2011	12:49:23 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:49:23 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:49:24 PM	Tube furnace set to 0
4/15/2011	12:50:24 PM	Helium valve closed
4/15/2011	12:50:24 PM	H2 valve closed
4/15/2011	12:50:24 PM	BCl3 valve closed
4/15/2011	12:50:24 PM	PH3 valve closed
4/15/2011	12:50:24 PM	SiCl4 pre valve closed
4/15/2011	12:50:24 PM	SiCl4 post valve closed
4/15/2011	12:50:24 PM	Bubbler valve closed
4/15/2011	12:50:24 PM	Main Vac valve opened
4/15/2011	12:50:24 PM	Bypass valve opened
4/15/2011	12:50:24 PM	Helium MFC set to  0.000000
4/15/2011	12:50:24 PM	H2 MFC set to  0.000000
4/15/2011	12:50:24 PM	BCl3 MFC set to  0.000000
4/15/2011	12:50:24 PM	PHl3 MFC set to  0.000000
4/15/2011	12:50:24 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:50:24 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:50:24 PM	Tube furnace set to 0
4/15/2011	12:51:01 PM	Run aborted at 12:51 PM
4/15/2011	12:51:01 PM	Helium valve closed
4/15/2011	12:51:01 PM	H2 valve closed
4/15/2011	12:51:01 PM	BCl3 valve closed
4/15/2011	12:51:01 PM	PH3 valve closed
4/15/2011	12:51:01 PM	SiCl4 pre valve closed
4/15/2011	12:51:01 PM	SiCl4 post valve closed
4/15/2011	12:51:01 PM	Bypass valve closed
4/15/2011	12:51:01 PM	Main Vac valve closed
4/15/2011	12:51:01 PM	Bubbler valve closed
4/15/2011	12:51:01 PM	Helium MFC set to  0.000000
4/15/2011	12:51:01 PM	H2 MFC set to  0.000000
4/15/2011	12:51:01 PM	BCl3 MFC set to  0.000000
4/15/2011	12:51:01 PM	PHl3 MFC set to  0.000000
4/15/2011	12:51:01 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:51:01 PM	Tube furnace set to 0
4/15/2011	12:51:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/15/2011	12:51:05 PM	Bypass valve opened
4/15/2011	12:51:08 PM	Main Vac valve opened
4/15/2011	12:51:12 PM	Helium valve opened
4/15/2011	12:51:15 PM	Helium MFC set to  100.000000
4/15/2011	12:51:50 PM	Helium MFC set to  0.000000
4/15/2011	12:51:53 PM	Helium valve closed
4/15/2011	12:52:29 PM	Recipe started at 12:52 PM
4/15/2011	12:52:29 PM	Helium valve closed
4/15/2011	12:52:29 PM	BCl3 valve closed
4/15/2011	12:52:29 PM	PH3 valve closed
4/15/2011	12:52:29 PM	SiCl4 pre valve closed
4/15/2011	12:52:29 PM	SiCl4 post valve closed
4/15/2011	12:52:29 PM	Main Vac valve closed
4/15/2011	12:52:29 PM	Bypass valve closed
4/15/2011	12:52:29 PM	Bubbler valve closed
4/15/2011	12:52:29 PM	H2 valve opened
4/15/2011	12:52:29 PM	Helium MFC set to  0.000000
4/15/2011	12:52:29 PM	H2 MFC set to  500.000000
4/15/2011	12:52:29 PM	BCl3 MFC set to  0.000000
4/15/2011	12:52:29 PM	PHl3 MFC set to  0.000000
4/15/2011	12:52:29 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:52:29 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:52:29 PM	Tube furnace set to 0
4/15/2011	12:53:47 PM	Helium valve closed
4/15/2011	12:53:47 PM	BCl3 valve closed
4/15/2011	12:53:47 PM	PH3 valve closed
4/15/2011	12:53:47 PM	SiCl4 pre valve closed
4/15/2011	12:53:47 PM	SiCl4 post valve closed
4/15/2011	12:53:47 PM	Main Vac valve closed
4/15/2011	12:53:47 PM	Bypass valve closed
4/15/2011	12:53:47 PM	H2 valve opened
4/15/2011	12:53:47 PM	Bubbler valve opened
4/15/2011	12:53:47 PM	Helium MFC set to  0.000000
4/15/2011	12:53:47 PM	H2 MFC set to  500.000000
4/15/2011	12:53:47 PM	BCl3 MFC set to  0.000000
4/15/2011	12:53:47 PM	PHl3 MFC set to  0.000000
4/15/2011	12:53:47 PM	SiCl4 MFC set to  0.000000
4/15/2011	12:53:47 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	12:53:47 PM	Tube furnace set to 1000
4/15/2011	1:13:47 PM	Helium valve closed
4/15/2011	1:13:47 PM	PH3 valve closed
4/15/2011	1:13:47 PM	Main Vac valve closed
4/15/2011	1:13:47 PM	Bypass valve closed
4/15/2011	1:13:47 PM	H2 valve opened
4/15/2011	1:13:47 PM	BCl3 valve opened
4/15/2011	1:13:47 PM	SiCl4 pre valve opened
4/15/2011	1:13:47 PM	SiCl4 post valve opened
4/15/2011	1:13:47 PM	Bubbler valve opened
4/15/2011	1:13:47 PM	Helium MFC set to  0.000000
4/15/2011	1:13:47 PM	H2 MFC set to  500.000000
4/15/2011	1:13:47 PM	BCl3 MFC set to  3.000000
4/15/2011	1:13:47 PM	PHl3 MFC set to  0.000000
4/15/2011	1:13:47 PM	SiCl4 MFC set to  50.000000
4/15/2011	1:13:47 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	1:13:47 PM	Tube furnace set to 1000
4/15/2011	1:33:47 PM	H2 valve closed
4/15/2011	1:33:47 PM	BCl3 valve closed
4/15/2011	1:33:47 PM	PH3 valve closed
4/15/2011	1:33:47 PM	SiCl4 pre valve closed
4/15/2011	1:33:47 PM	SiCl4 post valve closed
4/15/2011	1:33:47 PM	Main Vac valve closed
4/15/2011	1:33:47 PM	Bypass valve closed
4/15/2011	1:33:47 PM	Helium valve opened
4/15/2011	1:33:47 PM	Bubbler valve opened
4/15/2011	1:33:47 PM	Helium MFC set to  500.000000
4/15/2011	1:33:47 PM	H2 MFC set to  0.000000
4/15/2011	1:33:47 PM	BCl3 MFC set to  0.000000
4/15/2011	1:33:47 PM	PHl3 MFC set to  0.000000
4/15/2011	1:33:47 PM	SiCl4 MFC set to  0.000000
4/15/2011	1:33:47 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	1:33:47 PM	Tube furnace set to 0
4/15/2011	1:53:47 PM	Helium valve closed
4/15/2011	1:53:47 PM	H2 valve closed
4/15/2011	1:53:47 PM	BCl3 valve closed
4/15/2011	1:53:47 PM	PH3 valve closed
4/15/2011	1:53:47 PM	SiCl4 pre valve closed
4/15/2011	1:53:47 PM	SiCl4 post valve closed
4/15/2011	1:53:47 PM	Main Vac valve closed
4/15/2011	1:53:47 PM	Bypass valve closed
4/15/2011	1:53:47 PM	Bubbler valve closed
4/15/2011	1:53:47 PM	Helium MFC set to  0.000000
4/15/2011	1:53:47 PM	H2 MFC set to  0.000000
4/15/2011	1:53:47 PM	BCl3 MFC set to  0.000000
4/15/2011	1:53:47 PM	PHl3 MFC set to  0.000000
4/15/2011	1:53:47 PM	SiCl4 MFC set to  0.000000
4/15/2011	1:53:47 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	1:53:48 PM	Tube furnace set to 0
4/15/2011	1:53:48 PM	Run finished at 1:53 PM
4/15/2011	3:10:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	3:10:35 PM	Recipe started at 3:10 PM
4/15/2011	3:10:35 PM	H2 valve closed
4/15/2011	3:10:35 PM	BCl3 valve closed
4/15/2011	3:10:35 PM	PH3 valve closed
4/15/2011	3:10:35 PM	SiCl4 pre valve closed
4/15/2011	3:10:35 PM	SiCl4 post valve closed
4/15/2011	3:10:35 PM	Main Vac valve closed
4/15/2011	3:10:35 PM	Bypass valve closed
4/15/2011	3:10:35 PM	Bubbler valve closed
4/15/2011	3:10:35 PM	Helium valve opened
4/15/2011	3:10:35 PM	Helium MFC set to  500.000000
4/15/2011	3:10:35 PM	H2 MFC set to  0.000000
4/15/2011	3:10:35 PM	BCl3 MFC set to  0.000000
4/15/2011	3:10:35 PM	PHl3 MFC set to  0.000000
4/15/2011	3:10:35 PM	SiCl4 MFC set to  0.000000
4/15/2011	3:10:35 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	3:10:35 PM	Tube furnace set to 0
4/15/2011	3:10:39 PM	Helium valve closed
4/15/2011	3:10:39 PM	H2 valve closed
4/15/2011	3:10:39 PM	BCl3 valve closed
4/15/2011	3:10:39 PM	PH3 valve closed
4/15/2011	3:10:39 PM	SiCl4 pre valve closed
4/15/2011	3:10:39 PM	SiCl4 post valve closed
4/15/2011	3:10:39 PM	Main Vac valve closed
4/15/2011	3:10:39 PM	Bypass valve closed
4/15/2011	3:10:39 PM	Bubbler valve closed
4/15/2011	3:10:39 PM	Helium MFC set to  0.000000
4/15/2011	3:10:39 PM	H2 MFC set to  0.000000
4/15/2011	3:10:39 PM	BCl3 MFC set to  0.000000
4/15/2011	3:10:39 PM	PHl3 MFC set to  0.000000
4/15/2011	3:10:39 PM	SiCl4 MFC set to  0.000000
4/15/2011	3:10:39 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	3:10:40 PM	Tube furnace set to 0
4/15/2011	3:10:40 PM	Run finished at 3:10 PM
4/15/2011	3:10:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	3:12:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	3:12:47 PM	Recipe started at 3:12 PM
4/15/2011	3:12:47 PM	Helium valve closed
4/15/2011	3:12:47 PM	H2 valve closed
4/15/2011	3:12:47 PM	BCl3 valve closed
4/15/2011	3:12:47 PM	PH3 valve closed
4/15/2011	3:12:47 PM	SiCl4 pre valve closed
4/15/2011	3:12:47 PM	SiCl4 post valve closed
4/15/2011	3:12:47 PM	Main Vac valve closed
4/15/2011	3:12:47 PM	Bubbler valve closed
4/15/2011	3:12:47 PM	Bypass valve opened
4/15/2011	3:12:47 PM	Helium MFC set to  0.000000
4/15/2011	3:12:47 PM	H2 MFC set to  0.000000
4/15/2011	3:12:47 PM	BCl3 MFC set to  0.000000
4/15/2011	3:12:47 PM	PHl3 MFC set to  0.000000
4/15/2011	3:12:47 PM	SiCl4 MFC set to  0.000000
4/15/2011	3:12:47 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	3:12:47 PM	Tube furnace set to 0
4/15/2011	3:13:17 PM	Helium valve closed
4/15/2011	3:13:17 PM	H2 valve closed
4/15/2011	3:13:17 PM	BCl3 valve closed
4/15/2011	3:13:17 PM	PH3 valve closed
4/15/2011	3:13:17 PM	SiCl4 pre valve closed
4/15/2011	3:13:17 PM	SiCl4 post valve closed
4/15/2011	3:13:17 PM	Bubbler valve closed
4/15/2011	3:13:17 PM	Main Vac valve opened
4/15/2011	3:13:17 PM	Bypass valve opened
4/15/2011	3:13:17 PM	Helium MFC set to  0.000000
4/15/2011	3:13:17 PM	H2 MFC set to  0.000000
4/15/2011	3:13:17 PM	BCl3 MFC set to  0.000000
4/15/2011	3:13:17 PM	PHl3 MFC set to  0.000000
4/15/2011	3:13:17 PM	SiCl4 MFC set to  0.000000
4/15/2011	3:13:17 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	3:13:17 PM	Tube furnace set to 0
4/15/2011	3:13:18 PM	Run finished at 3:13 PM
4/15/2011	3:13:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	7:35:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	7:35:54 PM	Recipe started at 7:35 PM
4/15/2011	7:35:54 PM	H2 valve closed
4/15/2011	7:35:54 PM	BCl3 valve closed
4/15/2011	7:35:54 PM	PH3 valve closed
4/15/2011	7:35:54 PM	SiCl4 pre valve closed
4/15/2011	7:35:54 PM	SiCl4 post valve closed
4/15/2011	7:35:54 PM	Main Vac valve closed
4/15/2011	7:35:54 PM	Bypass valve closed
4/15/2011	7:35:54 PM	Bubbler valve closed
4/15/2011	7:35:54 PM	Helium valve opened
4/15/2011	7:35:54 PM	Helium MFC set to  500.000000
4/15/2011	7:35:54 PM	H2 MFC set to  0.000000
4/15/2011	7:35:54 PM	BCl3 MFC set to  0.000000
4/15/2011	7:35:54 PM	PHl3 MFC set to  0.000000
4/15/2011	7:35:54 PM	SiCl4 MFC set to  0.000000
4/15/2011	7:35:54 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	7:35:54 PM	Tube furnace set to 0
4/15/2011	7:36:51 PM	Run aborted at 7:36 PM
4/15/2011	7:36:51 PM	Helium valve closed
4/15/2011	7:36:51 PM	H2 valve closed
4/15/2011	7:36:51 PM	BCl3 valve closed
4/15/2011	7:36:51 PM	PH3 valve closed
4/15/2011	7:36:51 PM	SiCl4 pre valve closed
4/15/2011	7:36:51 PM	SiCl4 post valve closed
4/15/2011	7:36:51 PM	Bypass valve closed
4/15/2011	7:36:51 PM	Main Vac valve closed
4/15/2011	7:36:51 PM	Bubbler valve closed
4/15/2011	7:36:51 PM	Helium MFC set to  0.000000
4/15/2011	7:36:51 PM	H2 MFC set to  0.000000
4/15/2011	7:36:51 PM	BCl3 MFC set to  0.000000
4/15/2011	7:36:51 PM	PHl3 MFC set to  0.000000
4/15/2011	7:36:51 PM	SiCl4 MFC set to  0.000000
4/15/2011	7:36:52 PM	Tube furnace set to 0
4/15/2011	7:36:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/15/2011	7:38:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/15/2011	7:38:44 PM	Recipe started at 7:38 PM
4/15/2011	7:38:44 PM	Helium valve closed
4/15/2011	7:38:44 PM	H2 valve closed
4/15/2011	7:38:44 PM	BCl3 valve closed
4/15/2011	7:38:44 PM	PH3 valve closed
4/15/2011	7:38:44 PM	SiCl4 pre valve closed
4/15/2011	7:38:44 PM	SiCl4 post valve closed
4/15/2011	7:38:44 PM	Main Vac valve closed
4/15/2011	7:38:44 PM	Bubbler valve closed
4/15/2011	7:38:44 PM	Bypass valve opened
4/15/2011	7:38:44 PM	Helium MFC set to  0.000000
4/15/2011	7:38:44 PM	H2 MFC set to  0.000000
4/15/2011	7:38:44 PM	BCl3 MFC set to  0.000000
4/15/2011	7:38:44 PM	PHl3 MFC set to  0.000000
4/15/2011	7:38:44 PM	SiCl4 MFC set to  0.000000
4/15/2011	7:38:44 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	7:38:44 PM	Tube furnace set to 0
4/15/2011	7:39:16 PM	Helium valve closed
4/15/2011	7:39:16 PM	H2 valve closed
4/15/2011	7:39:16 PM	BCl3 valve closed
4/15/2011	7:39:16 PM	PH3 valve closed
4/15/2011	7:39:16 PM	SiCl4 pre valve closed
4/15/2011	7:39:16 PM	SiCl4 post valve closed
4/15/2011	7:39:16 PM	Bubbler valve closed
4/15/2011	7:39:16 PM	Main Vac valve opened
4/15/2011	7:39:16 PM	Bypass valve opened
4/15/2011	7:39:16 PM	Helium MFC set to  0.000000
4/15/2011	7:39:16 PM	H2 MFC set to  0.000000
4/15/2011	7:39:16 PM	BCl3 MFC set to  0.000000
4/15/2011	7:39:16 PM	PHl3 MFC set to  0.000000
4/15/2011	7:39:16 PM	SiCl4 MFC set to  0.000000
4/15/2011	7:39:16 PM	Bypass solenoid MFC set to  0.000000
4/15/2011	7:39:16 PM	Tube furnace set to 0
4/15/2011	7:39:17 PM	Run finished at 7:39 PM
4/15/2011	7:39:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
